Carbon Products
This product is a high-density/high-purity specialty carbon material and includes high-purity graphite materials widely used in semiconductor manufacturing processes which have a proven track record of use in semiconductor manufacturing system components. We also handle glass-like carbon that can be made to high purity standards.
ガラス状カーボン / Glass-like Carbon
Glass-like Carbon “Carbon material with excellent chemical and corrosion resistance”
- Semiconductor and Industrial Components
- Carbon Products
Glass-like Carbon is a type of carbon material with a proven track record for use in semiconductor manufacturing system components. High purity is also possible.
In addition to the general properties of carbon materials such as chemical resistance, corrosion resistance, heat resistance, and electrical conductivity, glass-like carbon has the characteristics of gas and liquid impermeability, isotropy, acid resistance, and no dust generation.
Because of these excellent characteristics, glass-like carbon is mainly used as a component in a semiconductor manufacturing system.
【Common Characteristics of Glass-like Carbon】
・Chemical resistance, corrosion resistance, heat resistance, electrical conductivity, and dust-free
・Impermeability to gases and liquids
・High purity (high purity is possible by a special treatment in the manufacturing process)
・High heat resistance, high X-ray permeability
【Characteristics of Glass-like Carbon Beads】
・Spherical carbon material with a smooth surface, which can be used as filler or porous material for ceramics, etc.
・Low thermal expansion and high thermal shock resistance.
・Dense isotropic structure without pores
・Central grain size 100μm, 200μm
【Characteristics of Porous Glass-like Carbon】
・Porous glass-like carbon has the characteristics of glass-like carbon and also has air permeability and liquid permeability.
・A proven track record in vacuum chuck applications, etc.
*For more information, please contact us or download our catalog.
Because of these excellent characteristics, glass-like carbon is mainly used as a component in a semiconductor manufacturing system.
【Common Characteristics of Glass-like Carbon】
・Chemical resistance, corrosion resistance, heat resistance, electrical conductivity, and dust-free
・Impermeability to gases and liquids
・High purity (high purity is possible by a special treatment in the manufacturing process)
・High heat resistance, high X-ray permeability
【Characteristics of Glass-like Carbon Beads】
・Spherical carbon material with a smooth surface, which can be used as filler or porous material for ceramics, etc.
・Low thermal expansion and high thermal shock resistance.
・Dense isotropic structure without pores
・Central grain size 100μm, 200μm
【Characteristics of Porous Glass-like Carbon】
・Porous glass-like carbon has the characteristics of glass-like carbon and also has air permeability and liquid permeability.
・A proven track record in vacuum chuck applications, etc.
*For more information, please contact us or download our catalog.
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BASIC INFORMATION
In addition to the general properties of carbon materials, such as chemical resistance, corrosion resistance, heat resistance, and electrical conductivity, glass-like carbon is impermeable to gases and liquids, isotropic, acid-resistant, and dust free.Special treatment in the manufacturing process makes it possible to achieve high purity. Because of these excellent features, it is mainly used as a component in semiconductor manufacturing equipment.
We also line up glass-like carbon beads, a spherical carbon material with a smooth surface that can be used as a porous material for fillers and ceramics, and porous glass-like carbon, which combines the characteristics of glass-like carbon with air and liquid permeability and has been used in vacuum chuck applications.
*For more information, please contact us or download our catalog.
APPLICATIONS/SALES RECORD
【Main Applications】・Plasma etching, CVD system components
・Sputtering targets
・High-purity and chemical-resistance materials
・Analyzer components
・Components for X-ray equipment
・Porous material (Glass-like carbon beads)
・Filler (Glass-like carbon beads)
・Vacuum chuck materials (porous Glass-like carbon)
・Various filters (porous glass-like carbon)
・Gas diffusion materials (Porous glass-like carbon)
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カーボン接着剤 / Carbon Adhesive
Carbon Adhesive “high-strength, heat-resistant adhesive for carbon materials”
- Semiconductor and Industrial Components
- Carbon Products
High-strength, heat-resistant adhesive for carbon materials. Adhesion is possible without impairing the excellent properties of carbon materials.
Carbon adhesives are high-strength, heat-resistant adhesives developed for carbon materials (graphite materials, C/C composites, etc.).
By carbonizing the adhesive itself, it is possible to bond carbon materials without impairing their excellent properties.
【Main Applications】
・Adhesion of graphite jigs
・Adhesion of seed crystals for SiC wafer growth
・Bonding graphite and C/C composites in a high-temperature vacuum and inert gas atmosphere.
*For more information, please contact us or download our catalog.
By carbonizing the adhesive itself, it is possible to bond carbon materials without impairing their excellent properties.
【Main Applications】
・Adhesion of graphite jigs
・Adhesion of seed crystals for SiC wafer growth
・Bonding graphite and C/C composites in a high-temperature vacuum and inert gas atmosphere.
*For more information, please contact us or download our catalog.
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BASIC INFORMATION
Carbon adhesives are high-strength, heat-resistant adhesives developed for carbon materials (graphite materials, C/C composites, etc.).By carbonizing the adhesive itself, it can adhere to carbon materials without impairing their excellent properties.
*For more information, please contact us or download our catalog.
APPLICATIONS/SALES RECORD
【Main Applications】・Bonding of graphite jigs
・Bonding of seed crystals for SiC wafer growth
・Bonding graphite and C/C composites in a high-temperature vacuum and inert gas atmosphere
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