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Cleaning Process

Jig Cleaning Department of one of our group companies, TOMCO, cleans and recycles parts and internal jigs for semiconductors, electronic parts, glass, and other deposition and manufacturing machines by using the most appropriate processing methods. With offering high quality services of our own factory in all processes, including etching, blasting, thermal spraying, precision cleaning in a clean room, and inspection, we contribute to cost reductions by improving product yields, and extending part life and maintenance cycles for our customers.

溶射1 / Thermal Spraying-1

  • 溶射1 / Thermal Spraying-1
  • 治具洗浄 / Jig Cleaning
  • 溶射2 / Thermal Spraying-2
  • 溶射3 / Thermal Spraying-3

Surface Modification Treatment Processing and Jig Cleaning (TOMCO)

  • Cleaning/Surface Treatment
  • Cleaning Process
  • TOMCO

Maintenance of jigs and parts is from quality maintenance and improvement. Our thermal spraying and cleaning technology reproduces high quality without damaging the base material.

In addition to the cleaning and reconditioning technologies, that Tomco boasts a long track record of, we have achieved complete in-house production of thermal spraying, a surface modification technology in which powder is melted and coated on the surface of materials.

【Features】
■ Achieving high densification, high insulation properties, wear resistance, and corrosion resistance
・We provide coating technologies that achieve high densification, high insulation properties, wear resistance, and corrosion resistance under thermal spraying conditions optimized for the materials and shapes of jigs and parts.

■High-quality reproduction of parts and jigs
・We provide high-quality reproduction of parts and jigs incorporated in vacuum chambers through our integrated production and management systems, from ultrasonic ultrapure water cleaning in our clean room to decompression drying and vacuum packing.

■We also support ultrapure water cleaning and vacuum packing.
・We support customers in the precision machinery field and other fields to improve their productivity through precision cleaning that removes invisible dirt and residual materials.

■Supporting productivity improvement
・We provide highly reproducible technical capabilities to always deliver products that are equivalent to evaluated products.

*Please contact us for more information.

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BASIC INFORMATION

In addition to the cleaning and reconditioning technologies that Tomco boasts a long track record of, we have achieved complete in-house production of thermal spraying, a surface modification technology in which powder is melted and coated on the surface of materials.

【Features of Surface Modification Processing】
・Surface modification can be optimized to the base material by applying a protective film or other surface treatment.
・Surface modification process reduces particles in parts of thin film manufacturing system.

【Features of Jig Cleaning】
・In addition to chemical and physical cleaning that minimizes damage to base materials, we also offer ultra-pure water cleaning and vacuum packing in clean rooms.
・We support customers in the precision machinery field and other fields to improve their productivity through precision cleaning that removes invisible dirt and residual materials.
・We provide highly reproducible technical capabilities to always deliver products that are equivalent to evaluated products.
*Please contact us for more information.

APPLICATIONS/SALES RECORD

【Applications】
・PVD system jigs and parts
・CVD system jigs and parts
・Etching system jigs and parts, etc.

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