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IPA Vapor Drying System

Wafer drying system manufactured by our group company is compatible with 4 to 8 inch wafers with using IPA vapor. Stand-alone type and built-in cleaner type are available.

IPA蒸気乾燥装置 / IPA Vapor Drying System

  • IPA蒸気乾燥装置 / IPA Vapor Drying System

IPA Vapor Drying System

  • Semiconductor Manufacturing System
  • IPA Vapor Drying System
  • AMAYA

IPA vapor displaces moisture and dries the object. For 4 to 8-inch wafers. Can be installed into and docked to various cleaning tools.

Wafer drying system using IPA vapor. Stand-alone type and built-in type are available.

【Features】
 ・IPA vapor drying system for 4-inch to 8-inch wafers
 ・Watermark free
 ・Can be installed into and docked to various cleaning tools
 ・Compatible with fine patterns
 ・High throughput

*Please contact us for more information.

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BASIC INFORMATION

Wafer drying system using IPA vapor.
Stand-alone type and built-in type cleaners are available.
●System size (stand-alone type): 800mm(W) x 900mm(D) x 950mm(H)
●Utilities: 3-phase AC200V, single-phase AC100V1, organic exhaust, clean dry air, N2, cooling water
●Main safety system: CO2 fire extinguisher, IPA gas concentration meter

*Please contact us for more information.

APPLICATIONS/SALES RECORD

【Applications】
 Silicon wafer/MEMS/Hard disk drying

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