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Quartz Tube Cleaning System

Quartz tube cleaning system cleans quartz tubes used in the diffusion, CVD, and annealing processes of semiconductor manufacturing.

石英管洗浄装置 / Quartz Tube Cleaning System

  • 石英管洗浄装置 / Quartz Tube Cleaning System

Quartz Tube Cleaning System (HTC/VTC series) “Contributing to the reduction of chemical solution and pure water”

  • Semiconductor Manufacturing System
  • Quartz Tube Cleaning System

Vertical cleaning system (VTC series) saves space and contributes to the "reduction of chemical solution and pure water". World's top-class delivery record (over 400 units)

The "HTC/VTC" series is a quartz tube cleaning system for cleaning quartz tubes used in the diffusion, CVD, and annealing processes.

【Features】
■The lineup of systems to match the shape of quartz tubes and cleaning applications
・Compatible with quartz tubes for 6-inch, 8-inch, and 12-inch processes.
・Horizontal type (HTC) and vertical type (VTC) can be selected according to the shape of the quartz tubes and cleaning applications.

■Saves space and contributes to the "reduction of chemical solution and pure water"
・Vertical type (VTC series) saves space and contributes to the "reduction of chemical solution and pure water"

■Customizable

■World top-class delivery record (over 400 units)
・World top-class delivery record (over 400 units) to domestic and overseas semiconductor device manufacturers and silicon wafer manufacturers.

■Extensive experience in handling related systems
・We are handling related systems such as quartz boat cleaning systems, quartz parts cleaning systems, quartz tube storage units, quartz transfer carts, and so on.

*For more information, please contact us or download our catalog.

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BASIC INFORMATION

The "HTC/VTC" series is a quartz tube cleaning system for cleaning quartz tubes used in the diffusion, CVD, and annealing processes.

The HTC/VTC series are compatible with quartz tubes for 6-inch, 8-inch, and 12-inch processes available in horizontal (HTC) and vertical (VTC) types according to the shape of the quartz tube and the cleaning application.
In particular, the vertical type (VTC) uses a shower nozzle circulation filtering system with a turn-tave rotation mechanism which saves space and contributes to the "reduction of chemical solution and pure water".
 
We have world top--class delivery record (over 400 units) to domestic and overseas semiconductor device manufacturers and silicon wafer manufacturers and will make the optimum proposal to meet your needs.

*For more information, please contact us or download our catalog.

APPLICATIONS/SALES RECORD

・We provide established system based on world top-class delivery record.
・We offer the most suitable cleaning method for each customer's needs by selecting either horizontal or vertical type.
・We have a large lineup of related systems and can meet a variety of customer's needs.
・We can also customize our products to meet your needs.

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