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Wafer Transfer System

Wafer transport and transfer system manufactured by our group company is the system that automatically transfers wafers (4 to 8 inches) from one open cassette to another, quartz (SiC) boat, and so on.

ウェハ搬送移載装置 / Wafer Transport and Transfer System

  • ウェハ搬送移載装置 / Wafer Transport and Transfer System

Wafer Transport and Transfer System “Pitch Conversion” and “Face to Face Transfer”

  • Semiconductor Manufacturing System
  • Wafer Transfer System
  • AMAYA

Automatic transfer of wafers in a cassette to another cassette/Possible to add functions such as simultaneous transfer of 2 cassettes, pitch conversion, and face-to-face (back-to-back) transfer.

Wafer transport and transfer system is the system that automatically transfers wafers from one open cassette to another open cassette, quartz (SiC) boat, and so on.

【Features】
 ・Transfer system for 4-inch to 8-inch wafers
 ・Automatic transfer of wafers in CR is possible.
 ・Possible to add functions such as simultaneous transfer of 2 cassettes, pitch conversion, and
face-to-face (back-to-back) transfer.

*Please contact us for more information.

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BASIC INFORMATION

Wafer transport and transfer system is the system that automatically transfers wafers from one open cassette to another open cassette, quartz (SiC) boat, and so on.
Possible to add functions such as simultaneous transfer of 2 cassettes, pitch conversion, and face-to-face (back-to-back) transfer.
・Open cassette←→Open cassette transfer
・Open cassette ←→ Quartz (SiC) boat transfer
・Simultaneous transfer of 2 cassettes
・Pitch conversion transfer
・Face to Face (Back to Back) transfer
・Single-wafer transfer to long boats

*Please contact us for more information.

APPLICATIONS/SALES RECORD

【Applications】
・Transfer of wafers between transport cassettes and process cassettes before and after diffusion/cleaning processes

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